Analytical Electron Microscopy (AEM)
Utilized signals: inelastically scattered electrons (energy-loss electrons) and X-rays.
Restrictions: Since electron-matter interactions are mostly elastic, high electron doses are necessary for all methods of analytical electron microscopy. A long recording time may be required for a good signal/noise ratio which is only possible if the sample is stable under the intense electron beam and if no specimen drift occurs.
Since ionization edges occur at characteristic energies and have different shapes, not all methods are equally suitable for all elements.