SEM – Imaging with Secondary Electrons

Imaging with secondary electrons provides information about morphology and surface topography. The contrast is dominated by the so-called edge effect: as a larger part of the interaction volume is close to the surface, more secondary electron are not absorbed and leave the sample at edges than in flat areas leading to increased brightness there (see scheme).

Edge

SEM basics   |  SE detectors   |  SEM images   |  Dependence on voltage

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