Electron Microscopes at ScopeM

A pool of different electron microscopes with various configurations is installed at the ETH Hönggerberg. The properties of the advanced electron microscopes that offer the most useful methods for solving problems in solid state chemistry and material science are presented below. A complete list of all microscopes of ScopeM can be found here.

TEM

Talos F200X

High brightness field emission gun (XFEG), acceleration voltage V_acc = 200 kV, point resolution ≈ 0.16 nm

• Equipment: 4 EDXS detectors (external page Bruker), Ceta CMOS camera, BF, ADF and HAADF STEM detectors
• Methods: TEM, HRTEM, EDXS, STEM
• Manufacturer: external page Thermo Fisher Scientific (TFS), Eindhoven

JEM-F200

Cold field emission gun (FEG), acceleration voltage V_acc = 200 kV, resolution ≈ 0.16 nm in TEM and STEM mode

• Equipment: BF and ADF detectors, external page Gatan Rio camera, external page Gatan EEL spectrometer, EDXS detectors (external page JEOL), BSE detector
• Methods: HRTEM, BF- and DF-TEM and STEM, ABF-STEM, HAADF-STEM, SEM, EDXS, EELS, EFTEM
• Manufacturer: external page JEOL, München, Tokyo

JEM-ARM300F "GrandARM"

Cold field emission gun (FEG), acceleration voltage V_acc = 300 kV, double-corrected system, resolution ≈ 0.08 nm in TEM and STEM mode

• Equipment: BF and ADF detectors, secondary electron detector, external page Gatan OneView camera, external page Gatan EEL spectrometer, EDXS detector (external page JEOL), various in-situ options
• Methods: HRTEM, BF- and DF-TEM and STEM, ABF-STEM, HAADF-STEM, SEM, EDXS, EELS, in-situ studies
• Manufacturer: external page JEOL, München, Tokyo

STEM

HD-2700CS

Cold field emission gun (FEG), acceleration voltage V_acc = 200 kV, external page CEOS corrector system, resolution < 0.1 nm

• Equipment: BF and ADF detectors, secondary electron detector, external page Gatan Orius CCD camera, external page Gatan EEL spectrometer, EDXS detector (external page EDAX)
• Methods: BF- and DF-STEM, SEM, EDXS, EELS
• Manufacturer: external page Hitachi, Düsseldorf

SEM

Merlin

Field emission gun (FEG), acceleration voltage V_acc = 0.2–30 kV

• Detectors: Inlens, conventional SE, BSE
• Methods: SEM, HRSEM, EDXS
• Manufacturer: external page Zeiss, Oberkochen

Magellan 400

Field emission gun (FEG), acceleration voltage V_acc = 0.05–30 kV

• Detectors: SE, BSE, and BF- and ADF-STEM
• Methods: SEM, STEM, EDXS
• Manufacturer: external page Thermo Fisher Scientific (TFS), Eindhoven

Quanta 200

Field emission gun (FEG), acceleration voltage V_acc = 2–30 kV

• Detectors: SE, BSE, EDXS and EBSD (external page EDAX)
• Methods: SEM, EDXS, EBSD, high and low vacuum modes
• Manufacturer: external page Thermo Fisher Scientific (TFS), Eindhoven