Zeiss Merlin

Manufacturer:
Zeiss

Model name:
Merlin

Location:
HPM A49.1

Phone:
2 39 44

external page Direct booking link to PPMS

Instrument contact:

Falk Lucas
Lecturer at the Department of Materials
  • HPM C 48
  • +41 44 633 34 52
  • Email
  • vCard Download

ScopeM
Otto-Stern-Weg 3
8093 Zürich
Switzerland

Enlarged view: Merlin

Brief description:

The Zeiss Merlin is an ultra-high resolution FE-SEM. The Gemini II column allows fast scanning modes with different probe currents (few pA–300 nA).

The connected Atlas System enables automatic scans over large areas only limited by the microscope stage and available image memory. Single image can have a maximum of 32k x 32k pixels.

Camera / detectors:

  • SE + SE in-lens
  • EsB (BSE)

Key features:

  • High Voltage: 0.02–30 kV
  • Emitter: Schottky Type
  • Gemini II column
  • ATLAS mosaic tool
  • Shuttle&Find (based on AxioVision)

Booking rules

The general ScopeM booking rules apply.

Exceptions for this system:

  • currently no time limit
  • schedule long runs (more than 4 days) in advance